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790™ Manual Loading Products for RIE and PECVD
 

790™ Series

Plasma-Therm’s 790™ platform is the latest in the 790™ Series of cost-efficient systems. With a large worldwide install base, the 790™ platform, offered in both RIE and PECVD configurations, has been field demonstrated to have low maintenance requirements and is easily operated in R&D through high production environments. Its reputation for robust performance makes the 790™ Series a preferred platform for R&D and production sites.

Process Control

  • EndpointWorks available with various endpoint technologies

Productivity Enhancements

  • Data logging
  • EndpointWorks
 
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