Process advantages

  • High stability in metal and dielectric processes.
  • 33 percent higher deposition rates with optional 7-in. grids.
  • High grid-to-grid repeatability.

 

 

IBD Marathon™ Grids

Marathon™ IBD Grids have a proven performance and reliability track record in volume production.

Marathon™ Ion Beam Deposition Grids provide stable and repeatable deposition processing, low maintenance, and long life. Marathon™ IBD grids have proven to last two to three times longer than the nearest competitor in high-volume manufacturing for either dielectric or metal deposition.

The dished deposition grid assembly incorporates innovative features to maintain beam focus on the deposition target over the lifetime of the grids. These features enable highly stable grid-to-grid alignment to eliminate grid plate erosion and contamination.

Plasma-Therm offers Marathon™ IBD grids in an optional 7-in. grid aperture to increase the beam current and deposition rate by 33 percent.

Marathon™ grid assemblies can be retrofitted to existing legacy IBD sources.

Source upgrades with grid retrofits

  • Most applications do not require source upgrades
  • Plasma-Therm offers an evaluation and repair/upgrade service to ensure that the source is performing to specifications.

Grid rebuild service

Level 1: Clean and replace hardware as needed. Complete metrology report.

Level 2: Clean plates and re-used hardware. Replace consumable hardware. Complete metrology report.

Level 3: New grid plates, clean re-used hardware. Replace consumable hardware. Complete metrology report.

 

 
 

Specifications

Hardware

Long-life, 3-Grid ion optics

Operating range

300 eV to 1500 eV, 100 mA to 500 mA (maximum current determined by grid aperture size and beam voltage selection).

Grid focal point

24 inches.

Grid aperture size

4.5 in., 6 in. and
optional 7 in. for 33 percent  higher deposition rate.

 

 

 
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