The vacuum and gas delivery systems can be machined and replaced as parts wear out keeping the process tool in use for decades.  The electronics of the IO control system is another story.  Once the proprietary sequencer and IO system begin to fail there is little that can be done - the electronics are no longer available.

Qualtx Technology, Inc. has developed a replacement control system for PlasmaTherm process tools using off-the-shelf IO components and modern Windows Vista compatible control system software.

Qualtx Technology provides a complete replacement of all IO and signal wiring - none of the original IO system is used.  The system is literally gutted. (view the picture of a system with its control system wires being removed)

View more pictures of control system retrofits...