Plasma-Therm's system control software implements numerous productivity enhancement features. These features improve productivity by real-time graphical representation and logging of process data, factory connectivity and recipe driven automated system cleans.
EndpointWorks™ is a modular, highly flexible endpoint detection system that utilizes multiple inputs to determine process endpoint. By configuring in the appropriate sensors, EndpointWorks™ can detect endpoint based on laser interferometry, reflectance, optical emission spectroscopy (OES), optical emission interferometry (OEI), RF parameter monitoring, or nearly any other available endpoint technique. EndpointWorks™ also features a wide array of user-friendly tools to assist in the analysis of historical data and optimization of new recipes. In addition, the modular nature of EndpointWorks™ means that as new endpoint techniques are developed, they can be rapidly integrated with the existing systems and put into production.
Plasma-Therm offers comprehensive data logging function which provides a recorded history of individual process parameters. Data is available in both tabular and graphical format and may be exported into spreadsheet programs.
Automated Maintenance Scheduler (AMS)
AMS allows the user to schedule regular plasma conditioning and/or cleaning of the process module via the recipe editor.
Plasma-Therm offers an optional factory automation interface that meets SEMI SECS/GEM standards. (Available on most products)
Remote Support Tool
In the semiconductor industry, equipment issues can result in expensive delays while the customer waits for a service engineer to arrive and repair the issue. The impact of unexpected issues is reduced by offering its customers the option of accessing our Remote Support Tool. When activated by the customer, the Remote Support Tool makes it possible for the customer to share the equipment user interface with Plasma-Therm technical support personnel in the factory for rapid assistance and minimized delays.
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