Product solutions for the renewable energies market

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Renewable Energy

As the global energy crisis intensifies, the need for renewable energy is greater than ever. Renewable energy sources include the sun, wind, water, biofuels, and underground heat. Devices that assist in energy conversion make up the renewable energy technology market. Most relevant to semiconductor processing are solar cells and power devices.

Solar energy is the primary driver of renewable energy technology. Plasma-Therm participates in this market with etch and PECVD process contributions to solar cell production. Plasma-Therm systems are used in production of wafer-scale photovoltaic (PV) and concentrated photovoltaic (CPV) solar cells. Our technologies that serve solar-cell production include etching of germanium (Ge) and gallium arsenide (GaAs), deposition of doped and intrinsic amorphous or micro-crystalline silicon, as well as deposition of silicon oxide and silicon nitride.


  • Etching for compound solar devices is achieved with high etch rates while maintaining profile control.
          - Ge
          - III-V materials
  • Deposition for R&D and production
          - Amorphous silicon
          - Doped
          - Intrinsic
          - Silicon oxide
          - Silicon nitride
          - Anti-reflective coatings
  • Wafer Singulation



For more information, contact us at or at +1.727.577.4999


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