Upgrades & Retrofits
Plasma-Therm is committed to ensuring that all of our customers benefit from on-going Continuous Improvement Programs (CIP). In maintaining with our focus of being the best at customer service, we listen to you, our customers. Our CIP activities with our customers allow communication through the chains of manufacturing through our Engineering department.
Through these efforts, Plasma–Therm has developed many enhancements, upgrades and retrofits for a wide variety of our product lines including our legacy systems. With these product enhancement retrofits and upgrades, our customers benefit with enhanced processing capabilities, improved reliability, and cost-efficiency.
Plasma-Therm also offers a variety of Spare Parts Packages to suit many requirements including consumable kits, recommended spares kits, Preventative Maintenance kits, and OEM packages.
A sample of our Upgrade/Retrofit packages include:
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Component Upgrades
- Turbo Pumps
- RF Train Components
- Throttle Valves
- Slot Valves
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Equipment Upgrades for Gen 2, Gen 3 and Gen 4 Photomask systems as well as Optical End Point, Versalock™, Shuttlelock™ and VERSALINE® systems.
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Control Systems Upgrades for Versalock™, Shuttlelock™ and VERSALINE® Systems
For more details, please contact your local sales representative. |
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