Versalock™
Plasma-Therm’s Versalock™ product line has been an industry standard for cluster based platforms for more than 15 years.
With more than 100 installed worldwide, the Versalock™ is available for production capacity increase or system redundancy when required.
Versalock™ is available with cassette-to-cassette handling in the following configurations: ICP, RIE, DSE™, PECVD and HDPCVD. |
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