Scientific & R&D

Versaline

Plasma-Therm’s VERSALINE platform is the workhorse for a variety of applications in specialty semiconductor markets.

The platform’s modular design allows flexible configuration of substrate handling and technologies that address the wide range of customer requirements. The VERSALINE platform provides flexibility with a variety of material-handling options. Additionally, the VERSALINE platform gives customers upgrade options that allow the system to evolve from a manual-loading configuration, to a single-substrate or batch carrier vacuum loadlock, to a fully automated cassette-to-cassette handler.

Diverse

VERSALINE accommodates diverse handling systems and process modules.

ML

Manual loading for single substrate or batch.

LL

Loadlock for single substrate or single batch carrier.

CX

For cassette loading purposes.

Hardware

Integrated multifunctional endpoint capability with EndpointWorks®Laser interferometry

  • Optical emission spectroscopy (OES)
  • Optical emission interferemetry (OEI)
  • System parameters (throttle valve position, pressure, forward power, etc.)
  • Custom inputs such as RGA and ellipsometer
Endpoint Options

Integrated multifunctional endpoint capability with EndpointWorks®Laser interferometry

  • Optical emission spectroscopy (OES)
  • Optical emission interferemetry (OEI)
  • System parameters (throttle valve position, pressure, forward power, etc.)
  • Custom inputs such as RGA and ellipsometer
Control System

Integrated multifunctional endpoint capability with EndpointWorks®Laser interferometry

  • Optical emission spectroscopy (OES)
  • Optical emission interferemetry (OEI)
  • System parameters (throttle valve position, pressure, forward power, etc.)
  • Custom inputs such as RGA and ellipsometer
Process

Integrated multifunctional endpoint capability with EndpointWorks®Laser interferometry

  • Optical emission spectroscopy (OES)
  • Optical emission interferemetry (OEI)
  • System parameters (throttle valve position, pressure, forward power, etc.)
  • Custom inputs such as RGA and ellipsometer
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