Power Devices

WHETHER YOU’RE WORKING WITH SILICON, SILICON CARBIDE, OR OTHER  WIDE-BANDGAP MATERIALS, WE GIVE YOU REPEATABILITY, RELIABILITY, AND LOWER COST OF OWNERSHIP FOR POWER DEVICE PROCESS TECHNOLOGIES

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To meet carbon neutrality goals, the world is relying on power transformation strategies to reduce greenhouse emissions. The critical role of power devices will drive high market growth in this area.  For every application that uses electricity, from consumer appliances  and electric vehicles to data centers  and energy generation, efficiency will be a key requirement. Power devices will be fundamental to  meeting that requirement. 

In addition to traditional silicon-based power devices, those fabricated from compound semiconductor materials like gallium nitride (GaN) and silicon carbide (SiC) are contributing to a cleaner environment. At Plasma-Therm®, we support both silicon- and compound semiconductor–based power device manufacturing with our etch, deposition, ion beam, and plasma dicing process technologies.

Etch

Our solutions range from sensitive gate recess etches to high-rate backside SiC via etch, as well as all the associated processes.

Deposition

Our flexible plasma-enhanced chemical vapor deposition (PECVD) process tools can be tuned to deliver the ideal dielectric films. Our physical vapor deposition (PVD) systems deliver a range of metals  solutions for backside or frontside requirements.

Thermal Processing

Our industry-standard thermal processing technology works on substrates up to 200mm in diameter for fast wafer size changes to accommodate the rapidly changing power device substrate market. 

Plasma Dicing

Plasma-etch dicing with the Singulator® system is ideal for power devices to enhance sidewalls, improve die strength, enable street sizes <10µm, and create any shape die you want. 

Power Device Applications

The efficiency of wideband power devices provides power supplies for consumer electronics that  deliver savings in weight and size as well as power. Power electronics are widely used in renewable energy power generation, electric vehicles, and space applications. They must withstand high voltages and currents to supply controlled power.

Wide-bandgap power devices are ideal for the high voltage requirements of power transmission and distribution.

Wide-bandgap power devices play an important strategic role as alternative power generation and local storage strategies become more distributed.

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clean energy, solar panels, wind turbines, battery pannels

EXPLORE ALL PROCESS TECHNOLOGY

We continuously improve our plasma etch, deposition, and dicing technology to help you build the best products on the market.

EXPLORE ALL PRODUCTS

Our easy-to-use plasma-based systems keep pace with your needs and are engineered to provide outstanding performance time after time.

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