Aftermarket Services, Spares, and Upgrades

We offer you equipment options: upgrades, retrofits, certified refurbishments, and spare parts for specific product series.

Upgrades and Retrofits

Through our Continuous Improvement Program and obsolescence engineering, we’ve developed upgrades and retrofit packages for all product lines, including legacy systems. Upgrades and retrofits can enhance equipment capabilities, improve reliability, and replace obsolete hardware.

We offer solutions for:

  • Control System Upgrades
  • Technology and Process Improvements
  • Productivity Enhancements

Upgrades and retrofits are available for all products. Learn more by filling out the contact form on this page.

Equipment Upgrades

  • VERSALINE® Series
  • Marathon grids™
  • Ion Beam Source
  • Mask Etcher® Series 
  • Shuttlelock®


Our spare-parts inventory is designed to balance your cost and risk. The selection includes consumable, non-consumable, and OEM new and refurbished equipment. Spare-parts kits are designed to help you keep predetermined process consumables on hand.

Our detailed spare-parts rating system helps you choose the most cost-efficient option to extend the lifetime of your Plasma-Therm equipment.

Worldwide service locations offer timely responses to minimize your downtime. State-of-the-art quality-control processes ensure you receive reliable parts that deliver predictable and repeatable results.

Our global infrastructure allows us to efficiently meet your needs for cost-effective and high-performance spare parts. 

Certified Refurbished

Our process equipment retains high value because of its reliability and longevity. For most systems, upgrades are available to customize these products to meet the needs of a variety of different markets.

  • The system (e.g., component part, subassembly) is restored to like-new operating condition through readjustments and material replacement.
  • We take all actions necessary to restore any unserviceable component parts, subassemblies, assemblies, and equipment.


Terms and Conditions(Required)