Etch and PECVD Solutions for Photonic Applications

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The photonics market, primarily based on compound semiconductor materials, includes devices that typically emit, reflect, transmit, or absorb photons. The principal devices in this market include:

  • Lasers
  • Microlenses
  • Arrayed Waveguides (AWG)
  • IR detectors
  • Optical Switches
  • Gratings

Plasma-Therm’s extensive experience with compound semiconductors has made it a leading supplier for the photonics market. Both R&D and production needs are supported. With an installed base of over 1300 systems, Plasma-Therm has developed a library of process information.

Typical Applications

  • Etch
          - InSb
          - HgCdTe
          - InP
          - GaAs/AlGaAs/InGaAs
          - SiO2
          - Si3N4
  • Deposition
          - SiO2
          - Si3N4
          - Tunable Index (Oxy-Nitride)
  • Wafer Singulation



Detail Images


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