Photonics

The photonics market, primarily based on compound semiconductor materials, includes devices which typically emit, reflect, transmit or absorb photons. The principle devices in this market include:

Lasers
Microlenses
Arrayed Waveguides (AWG)
IR detectors
Optical Switches
Gratings

Plasma-Therm’s extensive experience with compound semiconductors has made it a leading supplier for the photonics market. Both R&D and production needs are supported. With an installed base of over 1300 systems, Plasma-Therm has developed a library of process information.

Typical Applications

Etch
      - InSb
      - HgCdTe
      - InP
      - GaAs/AlGaAs/InGaAs
      - SiO2
      - Si3N4
Deposition
      - SiO2
      - Si3N4
      - Tunable Index (Oxy-Nitride)

Products

Detail Images