Technical Support

At Plasma-Therm®, our Technical Support Team strives to exceed your expectations. We provide timely and accurate responses and act on your behalf to drive the continuous improvement of products and services. Our Technical Support Team is the primary channel for resolving issues. A dedicated support person will help you with troubleshooting, upgrades, and continuous improvement plans. 

Our award-winning technical support ensures critical system uptime and availability to keep you going strong.


Phone: +1 (800) 246-2592


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24/7 Support

Our 24/7 technical support ensures quick turnaround and real-time follow-up during business hours, with after-hours support for production system troubleshooting and urgent replacement-part orders. An escalation procedure allows internal progress tracking to ensure your issue is resolved promptly. 

Remote Support

Semiconductor equipment issues can result in expensive delays while you wait for a service engineer to arrive and repair the issue. You can reduce the impact of unexpected issues by using a secure remote support communications channel. When you activate this channel, the remote support tool allows our technical support personnel to interact with the control system, install software updates, and check tool logs to provide immediate assistance.

Work Instructions

We maintain an extensive library of work instructions based on our extended product lineage. The library includes detailed instructions for many service and maintenance procedures. You can download work instructions from the customer portal.

Service Advisory

The Service Advisory provides technical bulletins and addresses issues with parts obsolescence, software upgrades, retrofit packages, and safety-related matters. It aims to anticipate improvement requests from both technical and safety aspects. 

Software Upgrades

We ship the most recent system software with all systems and include a complete documentation package in electronic form. Hard-copy documentation is available. All software updates include detailed release notes describing new and enhanced features and resolved issues. You can reference the latest release notes and documentation through the customer portal.


Let our experts help you customize our processes solutions for your applications.