Photonics

FROM SPECIFIC PROFILES TO THE SMALLEST GEOMETRIES, YOU’LL EXPERIENCE REPEATABILITY, RELIABILITY, AND LOWER COST OF OWNERSHIP IN COMPOUND SEMICONDUCTORS FOR PHOTONIC DEVICES.

Photonics place purple color

Photonic devices are designed to emit, reflect, transmit, or absorb photons spanning the electromagnetic spectrum from x-rays to the far infrared and have features ranging in size from nanoscale to tens of microns. All this is possible with materials as diverse as indium phosphide (InP), gallium nitride (GaN), silicon-based dielectrics, metals such as gold and platinum, and lithium niobate (LiNbO3). There isn’t any part of life that doesn’t use or rely on photonic devices. Whether for illumination, optotelecommunication, sensing, or displays, photonics is playing the critical role.

Most photonics devices are built using compound semiconductor materials, an area of manufacturing for which Plasma-Therm® is well known. When you partner with us, you’ll be tapping into the expertise that comes from installing more than 1,300 systems in both R&D and production.

Etch

Whether your photonics devices need high temperature for InP etching or ion-beam etching for lithium niobate or low-damage etching for microLEDs, we have it. 

Deposition

You’ll find the right film among our many deposition technologies. With PECVD, HDPCVD, PVD, IBD, RIBD, and F.A.S.T.®, one will provide the film properties you are looking for. 

Wafer Clean

Our high-density radical flux (HDRF™) low-temperature, downstream technology is proven for photonics applications, including photoresist removal without ion exposure, for optimum-quality devices. 

Plasma Dicing

Plasma dicing with the Singulator® system is ideal for damage-sensitive photonics devices. You get smooth sidewalls, improved die strength, street sizes <10µm, and any shape die you want. 

Photonics Applications

Augmented reality and virtual reality (AR/VR) headsets and a variety of displays with devices such as microLEDs, waveguides, and lasers provide users with a full 3D experience and are making human interaction in the metaverse possible.

Powering the Information Age are solid-state lasers, waveguides, and detectors that make up transceivers and operate in conjunction with fiber optics.  

Light is the choice for applications as diverse as biosensors for virus detection or LIDAR for detecting and imaging a deer in the road. 

woman playing with vr

VCSELs and Optoelectronics Tile

micro leds

Explore All Process Technology

We continuously improve our plasma etch, deposition, and dicing technology to help you build the best products on the market.

EXPLORE ALL PRODUCTS

Our easy-to-use plasma-based systems keep pace with your needs and are engineered to provide outstanding performance time after time.

NEED ASSISTANCE?

Let our experts help you customize our processes solutions for your applications.