PRODUCTS

Plasma-based etch, deposition, plasma dicing, and rapid thermal processing systems designed to exceed your expectations

Our easy-to-use plasma-based systems are among the best you’ll find — and for good reason. It’s in our DNA. Our continuous improvement processes keep us at the top of our game, so you get the best we have to offer in a variety of application-specific solutions. From etch and deposition applications to surface modification, stripping, and dicing, our systems keep pace with your needs and are engineered to provide outstanding performance time after time. 

PRODUCT CATEGORIES

ETCH

Modular designs for flexible configuration and material handling to meet your varied requirements

DEPOSITION

Engineered to continually deliver outstanding coverage, highly uniform film deposition, and material control

THERMAL PROCESSING

Designed to ensure damage-free material removal or create robust coatings that improve substrate surfaces

PLASMA DICING

Yield enhancing plasma singulation systems that address pain points of traditional saw dicing

EXPLORE ALL PRODUCTS

Our easy-to-use plasma-based systems keep pace with your needs and are engineered to provide outstanding performance

NEED ASSISTANCE?

Let our experts help you customize our processes solutions for your applications.