THERMAL PROCESSING

INDUSTRY STANDARD FOR RTP-CRITICAL APPLICATIONS SUCH AS DOPANT ACTIVATION, ANNEALS, SILICIDE FORMATION, AND CVD FILMS

At Plasma-Therm®, we strive to provide the most reliable technology available. For thermal processing, this means a proven platform that we are taking to a new level. We are updating our thermal processing system that has been serving the industry for over 20 years. As a result, your systems will continue to operate far into the future with the same innovation we bring to all our products. 

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