Tegal™ Etch Systems
TEGAL ETCH SYSTEMS ARE INDUSTRY PROVEN CASSETTE-TO-CASSETTE PLATFORMS FOR VOLUME MANUFACTURING
Plasma-Therm’s® Tegal 900 Series parallel-plate reactive ion etching (RIE) systems are industry standards for descum and noncritical dielectric etching. These systems, built for efficiency, reliability, and a small footprint, are available in both manual and cassette loading configurations.
Tegal Legacy Systems
We support spare parts and upgrades for a wide range of Tegal legacy products including 901e, 903e, 901g, and 6500 HRe cluster tools.
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