Tegal™ Etch Systems

TEGAL ETCH SYSTEMS ARE INDUSTRY PROVEN CASSETTE-TO-CASSETTE PLATFORMS FOR VOLUME MANUFACTURING

Plasma-Therm’s® Tegal 900 Series parallel-plate reactive ion etching (RIE) systems are industry standards for descum and noncritical dielectric etching. These systems, built for efficiency, reliability, and a small footprint, are available in both manual and cassette loading configurations.

Tegal Legacy Systems

We support spare parts and upgrades for a wide range of Tegal legacy products including 901e, 903e, 901g, and 6500 HRe cluster tools.

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  • Non-critical etches for a-Si, poly Si, SiNx, SiO2, and polymer thin films 
  • Descum
  • Backside blanket thinning
  • Planarization for either unpatterned layers or masked layers down to 1µ feature size

  • Configurations for substrates of 75mm to 200mm, round and square
  • Up to 4 process gases
  • 300W or 1000W RF power configurations
  • Auto match tuning

The Cortex® control system provides a stable, user-friendly control interface designed for efficiency and productivity. Cortex benefits include:

  • Graphical, SEMI-standard (E-95) interface
  • Comprehensive recipe editing and process parameter data logging and charting (real-time and post-processing)
  • Automated clean and conditioning routines with configurable triggers
  • Factory automation host interface (with optional SECS/GEM license)
  • User-level access control 
  • Auto logging of alarms, jobs, calibration, and resource usage
  • Integrated with GLANCE™ data logging and visualization tool
  • Same feature-rich control system as used on high-volume production systems

Tegal 6500 HRE Tool

Tegal HRE tool

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