Scientific & R&D - Plasma-Therm

At Plasma-Therm®, we understand that scientific R&D is where the magic happens. That’s why we invest in continuously improving our plasma-based processing technologies. We understand your specific research needs may vary from the needs of others. That’s why we’re always ready to help dial in your tool and process to ensure it meets your requirements.

That leaves you free to find new ways to connect us to the world and do things to keep us safe, make our lives easier, and empower us to do things we never could before. We are honored to help you and others achieve these tasks. So as you continue to push for the next great achievements, we’ll be right here with you.

Etch

Advanced process control with our EndpointWorks® program gives you valuable insight into a range of plasma etch capabilities for silicon, compound semiconductors, and other exotic substrate materials. We make sure you have the right process regime for the materials and features you work with, whether it’s diamond, metamaterial lenses, plasmonics, or quantum computing materials.

Deposition

You’ll find the right film among our many deposition technologies. With PECVD, HDPCVD, PVD, IBD, RIBD, and F.A.S.T., one will provide the film properties you are looking for.