Product solutions for solid-state lighting

MEOL Mid-End-Of-Line Wireless Photonics Solid State Lighting MEMS/NEMS Nanotechnology Renewable Energies Data Storage Photomask Research and Development

Solid-State Lighting

With soaring energy costs and global green initiatives, demand for energy-efficient solid-state lighting is rapidly increasing. The electroluminescence from GaN-based compound semiconductors has provided the foundation for a new lighting industry based on high-brightness LEDs.

Plasma-Therm has been a supplier to the leading LED manufacturers for more than 15 years. With expertise in etching gallium nitride (GaN), patterned sapphire substrates (PSS) and silicon carbide (SiC), as well as deposition of silicon oxide (SiO2) and nitride (SiNx), Plasma-Therm has partner with well established industry leaders, as well as smaller pioneering companies.

The Plasma-Therm product line includes equipment for R&D through high volume production. Innovative solutions for single wafer and batch clamping provide cutting edge etch rate performance. In addition, long maintenance intervals are standard with a closed-loop temperature controlled source. Low maintenance contributes to a low cost-of-ownership for Plasma-Therm systems.

Typical Applications

  • Etch
          - GaN etch
          - SiC
          - PSS (patterned sapphire substrate)
          - AlGaInP (and related materials)
          - GaP
  • Deposition
          - SiNx PECVD stress controlled at high rates with excellent conformality
          - SiO2—High breakdown voltage, low stress, low temperature
  • Wafer Singulation



Detail Images


For more information, contact us at or at +1.727.577.4999


  legal notice | privacy policy | site map | ©2010-2015 Plasma-Therm