VERSALINE®
Plasma-Therm’s VERSALINE® platform is the workhorse for a variety of applications in the specialty semiconductor markets. It incorporates a modular design that enables flexible configuration of substrate handling and technologies that address a wide range of customer requirements.
Substrate Handling Configurations
The VERSALINE® platform provides flexibility of a variety of handling options. Additionally, the VERSALINE® platform gives customers upgrade options that allow equipment to grow from a manual load configuration to a single-substrate or batch carrier loadlock to a fully automated cassette-to-cassette handler.
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ML — manual loading for single substrate or batch
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LL — loadlock for single substrate or single batch carrier
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CX — cassette loading
Etch
Deposition
Process Control
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EndpointWorks™ available with various endpoint technologies
Productivity Enhancements
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Data logging
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AMS (Automated Maintenance Scheduler)
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SECS/GEM
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