Plasma-Therm’s VERSALINE® platform is the workhorse for a variety of applications in the specialty semiconductor markets. It incorporates a modular design that enables flexible configuration of substrate handling and technologies that address a wide range of customer requirements.
Substrate Handling Configurations
The VERSALINE® platform provides flexibility of a variety of handling options. Additionally, the VERSALINE® platform gives customers upgrade options that allow equipment to grow from a manual load configuration to a single-substrate or batch carrier loadlock to a fully automated cassette-to-cassette handler.
ML — manual loading for single substrate or batch
LL — loadlock for single substrate or single batch carrier
CX — cassette loading
EndpointWorks™ available with various endpoint technologies
AMS (Automated Maintenance Scheduler)