PLASMA TECHNOLOGY DESIGNED FOR MAXIMUM PERFORMANCE
Premium plasma etch, deposition, and advanced packaging equipment for creating semiconductor devices that responsibly enhance the lives of people around the world.
HEATPULSE™ RTP
A redesigned single-wafer RTP platform with upgraded robotics and best-in-class process control software, Cortex®
At Plasma-Therm®, we design and build configurable wafer processing platforms for standard and advanced processes used in microelectronics manufacturing. From etch and deposition applications to rapid thermal processing and plasma dicing, our systems keep pace with your needs and are engineered to provide outstanding performance time after time.
TECHNOLOGY
We continually improve our process system technology to deliver the best performance possible.
MARKETS & APPLICATIONS
Our systems support etch, deposition, thermal, material modification and die singulation applications for existing and emerging microelectronics markets.
PRODUCTS
We continue to build our product portfolio to help you remove risk, increase efficiency, enhance capacity, and increase yield.
WE’RE LOOKING FOR BRIGHT MINDS LIKE YOURS!
Join us in our quest to enhance the human experience.
Latest Blogs and News
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Plasma-Therm Receives Follow-On Order in Japan for Its Heatpulse RTP System For SiC Power MOSFET Devices Used in Automotive and EV Applications
SEMICON Japan, Tokyo, December 15, 2022 — Plasma-Therm, a leading manufacturer of plasma-process equipment for the semiconductor and compound semiconductor industries, today announced it has received an order from a leading Japanese device maker for multiple systems built on Plasma-Therm’s newly redesigned Heatpulse rapid thermal processing (RTP) platform, launched in July at SEMICON West 2022. […]
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Plasma-Therm Strengthens Presence in Europe to Collaborate With Customers on New Microelectronics Development
SEMICON Europa, Munich, Germany, November 15, 2022—Plasma-Therm, a leading manufacturer of plasma-process equipment for the semiconductor and compound semiconductor markets, today announced its Grenoble location will serve as regional headquarters to support customers located in central Europe, Middle East and North Africa (EMEA) markets focused on developing power, wireless, memory, sensor and MEMS, and other […]
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Plasma-Therm Rolls Out Redesigned Heatpulse Rapid Thermal Processing Platform to Meet Evolving Market Requirements
SEMICON West, San Francisco, Calif., July 12, 2022—Plasma-Therm, a leading manufacturer of plasma-process equipment for the semiconductor and compound semiconductor industries, today announced it has redesigned its flagship Heatpulse Rapid Thermal Processing (RTP) platform. The move was driven by three key factors: an increase in market demand for power devices, other specialty markets and ≤200mm […]
UPCOMING EVENTS
SEMICON West
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We are excited for you to join us at SEMICON West 2023, where we will be showcasing our latest semiconductor manufacturing solutions.
NEED ASSISTANCE?
Let our experts help you customize our processes solutions for your applications.