Plasma processing plays a vital role in semiconductor manufacturing, especially in ultra-large-scale integrated fabrication, by...
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Plasma-Therm Receives Follow-On Order in Japan for Its Heatpulse RTP System For SiC Power MOSFET Devices Used in Automotive and EV Applications
SEMICON Japan, Tokyo, December 15, 2022 — Plasma-Therm, a leading manufacturer of plasma-process equipment for...
Plasma-Therm Strengthens Presence in Europe to Collaborate With Customers on New Microelectronics Development
SEMICON Europa, Munich, Germany, November 15, 2022—Plasma-Therm, a leading manufacturer of plasma-process equipment for the...
Plasma-Therm Rolls Out Redesigned Heatpulse Rapid Thermal Processing Platform to Meet Evolving Market Requirements
SEMICON West, San Francisco, Calif., July 12, 2022—Plasma-Therm, a leading manufacturer of plasma-process equipment for...
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Plasma-Therm Rolls Out Redesigned Heatpulse Rapid Thermal Processing Platform to Meet Evolving Market Requirements
SEMICON West, San Francisco, Calif., July 12, 2022—Plasma-Therm, a leading manufacturer of plasma-process equipment for the semiconductor and compound semiconductor industries, today announced it has redesigned its flagship Heatpulse Rapid Thermal Processing (RTP) platform. The move was driven by three key factors: an increase in market demand for power devices, other specialty markets and ≤200mm […]