In a high-stakes, high-speed world of semiconductor innovation, your tools must be as agile as your ideas. Plasma-Therm, along with its growing family of trusted brands, delivers a comprehensive suite of plasma processing solutions—from compact R&D systems to advanced, high-throughput production platforms.
Whether you’re working in early-stage development or full-scale manufacturing, Plasma-Therm, Corial, Advanced Vacuum, Thin Film Equipment (TFE), and CHA Industries provide the flexibility and precision you need to bring your technology to life.
A Powerful Family of Brands—One Mission: Enabling Innovation to Enhance the Human Experience
At the forefront of semiconductor technology, Plasma-Therm leads the way with scalable plasma etch and deposition platforms designed to support everything from advanced research to high-volume manufacturing.
Corial delivers compact, high-performance RIE, ICP, and PECVD systems—ideally suited for labs, universities, and pilot lines focused on MEMS, photonics, and power devices.
Advanced Vacuum brings deep expertise in vacuum and deposition technologies, tailored specifically for compound semiconductors and optoelectronics.
Thin Film Equipment (TFE) offers state-of-the-art plasma systems for atomic layer etching (ALE) and other next-generation thin film processes, enabling nanoscale precision for cutting-edge applications.
CHA Industries provides trusted thermal and e-beam evaporation systems, widely used by labs and fabs around the world for metal deposition and lift-off processes.
Together, these brands form a cohesive portfolio that spans the entire innovation lifecycle—from tabletop R&D tools to high-throughput, multi-chamber production platforms—backed by industry-leading process performance and comprehensive global support.
Full-Spectrum Solutions for Leading Technologies
Collectively, Plasma-Therm and its family of brands empower key industries and fast-growing markets, including:
- Wireless and Connectivity
- Photonics and Quantum Devices
- Power Electronics and Compound Semiconductors
- Advanced Packaging and Emerging Materials
- MEMS and Sensors
Whether you’re prototyping the next breakthrough innovation or scaling up in a 24/7 production fab, Plasma-Therm delivers the technology, expertise, and support to accelerate your success—every step of the way.rough or scaling production in a 24/7 fab, Plasma-Therm is your partner in progress.
