IBE Marathon™ Grids



Long-life, 3-Grid ion optics.

Operating Range

Maximum current determined by grid aperture size selection and beam voltage selection.

Grid aperture size

12 in.


More than 2 times longer than competing grids.


150 mm wafer, 200 mm wafer and up to 9.5-inch pallet.

IBE Marathon Grids

Marathon™ IBE Grids have a proven performance and reliability track record in volume production.

Marathon™ Ion Beam Etch Grids are the result of applying advanced principles of ion beam plasma theory to robust thermal-mechanical design. The grids are extremely stable over the operating range and provide excellent matching between grid sets.

Marathon™ IBE grids have the longest life and lowest cost of ownership in the industry. Through careful design and tolerancing, Marathon™ grids perform consistently from beginning to end of life. Highly stable grid-to-grid alignment minimizes grid plate erosion and contamination, providing stable and repeatable IBE processing. Their proven lifespan is two to three times longer than the nearest competitor in high-volume manufacturing.

Plasma-Therm can retrofit Marathon™ grid assemblies to existing legacy IBE sources. Retrofits includes source stabilization upgrades.

Source upgrades with grid retrofits

  • Upgrade source mounting rods for improved mechanical stability.
  • Upgrade RF coil position fingers for improved RF plasma repeatability.
  • Optional single-piece quartz plasma containment vessel eliminates plasma leaks, thereby enhancing uniformity and eliminating extended troubleshooting downtime.

Grid Rebuild Service

  • Level 1: Clean and replace hardware as needed. Complete metrology report
  • Level 2: Clean and anneal plates, clean re-used hardware. Replace consumable hardware. Complete metrology report.
  • Level 3: New grid plates, clean re-used hardware. Replace consumable hardware. Complete metrology report.

Process advantages

  • Excellent uniformity
  • High Grid-to-Grid repeatability
  • High process repeatability wafer to wafer

Certified Pre-Owned Products

Lorem ipsum dolor sit amet, consectetur adipiscing elit, sed do eiusmod tempor incididunt ut labore et dolore magna aliqua. Nisl tincidunt eget nullam non. A pellentesque sit amet porttitor eget dolor morbi non. In egestas erat imperdiet sed. Tellus id interdum velit laoreet id donec. Faucibus purus in massa tempor nec feugiat nisl. Mi proin sed libero enim. Dictum at tempor commodo ullamcorper a lacus vestibulum. Nisi est sit amet facilisis magna etiam. Lobortis mattis aliquam faucibus purus in massa tempor nec. Non pulvinar neque laoreet suspendisse interdum consectetur libero id faucibus. Arcu dui vivamus arcu felis bibendum ut.


Terms and Conditions(Required)