Whitepaper

Silicon Nitride for MEMS Applications: LPCVD and PECVD Process Comparison

Silicon Nitride for MEMS Applications: LPCVD and PECVD Process Comparison

The MEMS industry grew by more than 10% in 2012, a year when the semiconductor industry experienced a 2% decline. The growth in MEMS was largely fueled by portable electronics with motion sensors and microphones in smartphones and tablets. Billions of MEMS devices have already been shipped and promising new applications in transportation, health care, sensor networks and structural monitoring have visionaries in the MEMS industry talking about trillions of MEMS devices.

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